Together with LioniX, iX-factory is conducting research experiments in integrated optics in general and in
SiON/SiN technology in particular since more than 10 years. In close cooperation with the Lightwave Devices Group,
we have succeeded to control important SiON/SiN layer properties (e.g. thickness and refractive index uniformity,
material birefringence, stress etc.), so that LioniX and iX-factory can provide its customers with cutting-edge
integrated optics technology for both sensor and telecom applications.
Integrated optics for microfluidic detection.
