iX-factory has also years of experience in MEMS structures, the engineers worked in the past on different MEMS projects and made a broad variation of MEMS structures.
An example of such a project is the MEMS based artificial electro-mechanical hair-sensors with SU-8 hairs made at the Transducers Science and Technology Group,
conducted by Prof. Dr. Miko Elwenspoek, at the University of Twente, The Netherlands.
It is one of the leading groups in the world in the field of Micro System Technology (MST).
Research is focused on the design and fabrication of Micro Electro Mechanical Systems (MEMS).
The picture below shows the MEMS based artificial electro-mechanical hair-sensors with SU-8 hairs.
SU-8 hairs on a MEMS sensor (source TST-Group MESA+)
