MEMS Foundry Service – The Heart of our Work .....

The MEMS . Foundy Service is fundamental to all our services. Our customers are based in widely different fields of businesses, but all have a specific need for MST / MEMS-based products. Often companies do not have access to the critical technologies. In this context we offer single step MEMS - Foundry Services as well as processing of complex structures and components.

Our MEMS - Foundry Services are performed by iX-factory engineers and operators on our own equipment at the MST-factory, Dortmund. In addition iX-factory can use the equipment of the MESA+ institute by LioniX BV in The Netherlands.

iX-factory´s MEMS − Foundry Services are not directed at any particular market, however we experience a particular influx from telecom startups, life science and IPC equipment manufacturers and research institutes.

Our processes are performed on 100, 150 as well as 200 mm silicon, SOI, DSOI, borosilicate, fused silica and other substrates. We work with carefully selected wafer manufacturers who deliver on request single/double side polished, doping levels, roughness, bow/warp etc. There is also the option to ship your own wafers, blank or processed – and we provide the next process step(s). See here all technologies.
that we offer.