iX-factory offers also a broad range of miscellaneous cleanroom processes like:
- Chemical mechanical planarization (CMP) of silicon oxynitrides and copper
- Polymers (SU8, Polymide, ...)
- Annealing and reflow of silicon oxynitrides
- Implantations of Boron, Phosphorus and Arsenic
- Solid source doping (SSD) of Boron
- Diffusion and drive-in of dopings
- Electroplating of copper
